- Product
- Sputter
Products
Sputter
Sputter
[Application]
- Semiconductor PKG
- SAW Filter
- Cluster type
- EFEM / Loadlock & Degassing / PT / Transfer / PM(SUS, Cu) / Stock
[Advantage]
- Implementation of processes below 100℃ for excellent step coverage and device protection
- High quality/highly uniform thin film formation
- Round type cathode with excellent deposition efficiency compared to target erosion
